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CAS No. 115-25-3 Item No. 115-25-3
Name Octafluorocyclobutane (C318)
Name in Chinese 八氟环丁烷(C318)
Application Electronic specialty gas for semiconductor plasma etching; also used as dielectric insulating gas, refrigerant and aerosol propellant.
Appearance
Formula 200.03 Molecular Weight C₄F₈
Storage Condition Store in cool and well-ventilated area, keep cylinder tightly sealed, avoid direct sunlight, keep away from heat source.
Capacity Available in cylinder quantity supply.
Package 10L, 40L, 47L steel cylinder.
Shipment Method Transported as non-flammable compressed liquefied gas, fix cylinders upright, avoid sun exposure.
Smiles None

Application

Electronic specialty gas for semiconductor plasma etching; also used as dielectric insulating gas, refrigerant and aerosol propellant.